Auger nanoprobe

Welcome to the website of the Auger Spectroscopy Laboratory at Clausthal University of Technology.

The development and characterization of new material systems and materials plays an important role in materials science research at Clausthal University of Technology. We can offer the following material analysis

• high-resolution microscopy (SEM)
• high-resolution chemical analysis of the relevant imaged structures (XPS, AES)

With regard to high lateral resolution, especially in element-specific mode, and broad applicability with the lowest possible preparation effort, an Auger nanoprobe of the highest performance class is the device of choice (NanoSAM). Such devices achieve specifications that hardly differ from those of high-resolution scanning electron microscopes with field emitters in secondary electron microscopy (SEM) mode, but deliver a high beam current density, which is necessary for efficient chemical analysis.

In particular, the Auger nanoprobe offers the following key advantages for element-specific material analysis:

• High lateral limiting resolution
• High sensitivity for light elements
• Further chemical information
• depth information
• Recording of depth profiles
• Particle analysis